Assignee
YAMAZOE KENJI
US·5 granted patents·18 citations·filing 2008–2011
Top patents by PatentIndex Score
5 records- 0191US8059262B2Calculation program, and exposure method for calculating light intensity distribution formed on image planeYAMAZOE KENJI·Filed 2008·Granted Nov 15, 2011·11 cites·5 claims
- 0272US8321815B2Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing methodYAMAZOE KENJI·Filed 2009·Granted Nov 27, 2012·3 cites·11 claims
- 0367US8239787B2Method of generating original plate data by repeatedly calculating approximate aerial imageYAMAZOE KENJI·Filed 2008·Granted Aug 7, 2012·2 cites·5 claims
- 0464US8843337B2Apparatus for measuring shape of test surface, and recording medium storing program for calculating shape of test surfaceYAMAZOE KENJI·Filed 2010·Granted Sep 23, 2014·2 cites·8 claims
- 0556US8908153B2Method to calculate transmission cross coefficient in an exposure apparatusYAMAZOE KENJI·Filed 2011·Granted Dec 9, 2014·0 cites·9 claims
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