Assignee
YANAGIDA TATSUYA
JP·4 granted patents·1 pending application·48 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0196US8669543B2System and method for generating extreme ultraviolet light, and laser apparatusYANAGIDA TATSUYA·Filed 2011·Granted Mar 11, 2014·20 cites·27 claims
- 0293US8558202B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2011·Granted Oct 15, 2013·14 cites·24 claims
- 0382US8436328B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2009·Granted May 7, 2013·14 cites·16 claims
- 0439US8853656B2Extreme ultraviolet light source deviceYANAGIDA TATSUYA·Filed 2009·Granted Oct 7, 2014·0 cites·15 claims
- 0538US2013105712A1Apparatus and method for generating extreme ultraviolet lightYANAGIDA TATSUYA·Filed 2012·Application pending·0 cites
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