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YAO DAPING
US3 patents
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US8664126B2Mar 4, 2014
Selective deposition of polymer films on bare silicon instead of oxide surface
YAO DAPING2 citations58
US9478437B2Oct 25, 2016
Methods for repairing low-k dielectrics using carbon plasma immersion
YAO DAPING0 citations48
US8492177B2Jul 23, 2013
Methods for quantitative measurement of a plasma immersion process
YAO DAPING0 citations48