Assignee
YASUDA ATSUSHI
JP·3 granted patents·0 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0145US9109060B2Method for producing polymer, polymer for lithography, resist composition, and method for producing substrateYASUDA ATSUSHI·Filed 2010·Granted Aug 18, 2015·0 cites·6 claims
- 0237US8763456B2Liquid level detection apparatusYASUDA ATSUSHI·Filed 2012·Granted Jul 1, 2014·0 cites·1 claims
- 0335US9733564B2Copolymers for lithography and method for producing same, resist composition, method for producing substrate with pattern formed thereupon, method for evaluating copolymers, and method for analyzing copolymer compositionsYASUDA ATSUSHI·Filed 2011·Granted Aug 15, 2017·0 cites·6 claims
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