Assignee
YEH CHIN-TSAN
TW·1 granted patent·1 pending application·0 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0134US8445982B2Method of forming a semiconductor deviceYEH CHIN-TSAN·Filed 2011·Granted May 21, 2013·0 cites·11 claims
- 0231US2013241075A1Contact or via critical dimension control with novel closed loop control system in chemical mechanical planarization processYEH CHIN-TSAN·Filed 2012·Application pending·0 cites
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