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YEH MATT
TW6 patents
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US8415254B2Apr 9, 2013
Method for removing dummy poly in a gate last process
YEH MATT19 citations91
US8110490B2Feb 7, 2012
Gate oxide leakage reduction
YEH MATT5 citations62
US8268085B2Sep 18, 2012
Methods for forming metal gate transistors
YEH MATT2 citations61
US8569185B2Oct 29, 2013
Method of fabricating gate electrode using a treated hard mask
YEH MATT0 citations51
US8173504B2May 8, 2012
Method of fabricating gate electrode using a treated hard mask
YEH MATT0 citations51
US8980706B2Mar 17, 2015
Double treatment on hard mask for gate N/P patterning
YEH MATT0 citations40