Assignee
YEOM GEUN YOUNG
KR·2 granted patents·2 pending applications·0 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0146US8974630B2Inductively coupled plasma processing apparatus having internal linear antenna for large area processingYEOM GEUN-YOUNG·Filed 2008·Granted Mar 10, 2015·0 cites·8 claims
- 0246US8293069B2Inductively coupled plasma apparatusYEOM GEUN-YOUNG·Filed 2008·Granted Oct 23, 2012·0 cites·6 claims
- 0333US2012129347A1Apparatus and Method For Incorporating Composition Into Substrate Using Neutral BeamsYEOM GEUN-YOUNG·Filed 2011·Application pending·0 cites
- 0433US2013049592A1Method for controlling synchronization of pulsed plasma by applying dc powerYEOM GEUN YOUNG·Filed 2012·Application pending·0 cites
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