Assignee
YOKOTA YOSHITAKA
US·4 granted patents·18 citations·filing 2010–2011
Top patents by PatentIndex Score
4 records- 0186US8409353B2Water cooled gas injectorYOKOTA YOSHITAKA·Filed 2011·Granted Apr 2, 2013·6 cites·15 claims
- 0284US8546271B2Method of improving oxide growth rate of selective oxidation processesYOKOTA YOSHITAKA·Filed 2011·Granted Oct 1, 2013·5 cites·20 claims
- 0384US8492292B2Methods of forming oxide layers on substratesYOKOTA YOSHITAKA·Filed 2010·Granted Jul 23, 2013·7 cites·19 claims
- 0452US8497193B2Method of thermally treating silicon with oxygenYOKOTA YOSHITAKA·Filed 2011·Granted Jul 30, 2013·0 cites·21 claims
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