Assignee
YONEKURA HIROSHI
JP·3 granted patents·8 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0181US8542474B2Electrostatic chuckYONEKURA HIROSHI·Filed 2010·Granted Sep 24, 2013·7 cites·4 claims
- 0258US8641825B2Substrate temperature regulation fixed apparatusYONEKURA HIROSHI·Filed 2009·Granted Feb 4, 2014·1 cites·3 claims
- 0340US8698514B2Electrical characteristic measuring substrateYONEKURA HIROSHI·Filed 2010·Granted Apr 15, 2014·0 cites·5 claims
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