Assignee
YOON KYONG HO
KR·3 granted patents·20 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0195US8445187B2Hardmask composition having antireflective properties and method of patterning material on substrate using the sameYOON KYONG HO·Filed 2011·Granted May 21, 2013·16 cites·13 claims
- 0286US8263321B2Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layerYOON KYONG HO·Filed 2010·Granted Sep 11, 2012·4 cites·10 claims
- 0347US8697341B2Aromatic ring containing polymer, underlayer composition including the same, and associated methodsYOON KYONG-HO·Filed 2011·Granted Apr 15, 2014·0 cites·15 claims
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