Assignee
YOSHIDA ISAO
JP4 patents
Top patents by PatentIndex Score
US8236842B2Aug 7, 2012
Salt and process for producing acid generator
YOSHIDA ISAO22 citations92
US8124803B2Feb 28, 2012
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
YOSHIDA ISAO23 citations92
US8530138B2Sep 10, 2013
Salt and photoresist composition comprising the same
YOSHIDA ISAO3 citations62
US8741544B2Jun 3, 2014
Salt, photoresist composition and method for producing photoresist pattern
YOSHIDA ISAO2 citations61