Assignee
YOSHIDA TOMOHIKO
JP·2 granted patents·4 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0169US9256231B2Device manufacturing apparatus and device manufacturing methodYOSHIDA TOMOHIKO·Filed 2010·Granted Feb 9, 2016·3 cites·8 claims
- 0262US8638416B2Device manufacturing apparatus, including coolant temperature control, and method of manufacturing deviceYOSHIDA TOMOHIKO·Filed 2010·Granted Jan 28, 2014·1 cites·9 claims
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