Assignee
YOSHIKAWA RYOICHI
JP·2 granted patents·23 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0192US8710467B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodYOSHIKAWA RYOICHI·Filed 2012·Granted Apr 29, 2014·13 cites·10 claims
- 0288US8586951B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodYOSHIKAWA RYOICHI·Filed 2012·Granted Nov 19, 2013·10 cites·16 claims
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