Assignee
YU LIANZHONG
US·2 granted patents·1 pending application·1 citations·filing 2005–2010
Top patents by PatentIndex Score
3 records- 0150US8057690B2Single silicon-on-insulator (SOI) wafer accelerometer fabricationYU LIANZHONG·Filed 2009·Granted Nov 15, 2011·1 cites·14 claims
- 0239US8481354B2Methods of creating a micro electro-mechanical systems accelerometer using a single double silicon-on-insulator waferYU LIANZHONG·Filed 2010·Granted Jul 9, 2013·0 cites·5 claims
- 0332US2007004056A1Systems and methods for direct silicon epitaxy thickness measuringYU LIANZHONG·Filed 2005·Application pending·0 cites
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