Assignee
YU WEIBO
SG·3 granted patents·10 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0185US8735252B2Method of semiconductor integrated circuit fabricationYU WEIBO·Filed 2012·Granted May 27, 2014·9 cites·15 claims
- 0261US8932962B2Chemical dispensing system and methodYU WEIBO·Filed 2012·Granted Jan 13, 2015·1 cites·10 claims
- 0341US9355874B2Silicon nitride etching in a single wafer apparatusYU WEIBO·Filed 2011·Granted May 31, 2016·0 cites·16 claims
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