Assignee
YUASA KAZUHIRO
JP·5 granted patents·492 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0198US9190264B2Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording mediumYUASA KAZUHIRO·Filed 2012·Granted Nov 17, 2015·479 cites·19 claims
- 0287US8822350B2Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatusYUASA KAZUHIRO·Filed 2011·Granted Sep 2, 2014·8 cites·15 claims
- 0373US8448599B2Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor deviceYUASA KAZUHIRO·Filed 2011·Granted May 28, 2013·2 cites·16 claims
- 0467US8901013B2Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor deviceYUASA KAZUHIRO·Filed 2011·Granted Dec 2, 2014·2 cites·15 claims
- 0561US9055900B2Specimen measurement device and specimen measurement systemYUASA KAZUHIRO·Filed 2012·Granted Jun 16, 2015·1 cites·9 claims
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