Assignee
YUN GUNSU
US·2 granted patents·36 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0184US8340827B2Methods for controlling time scale of gas delivery into a processing chamberYUN GUNSU·Filed 2009·Granted Dec 25, 2012·29 cites·15 claims
- 0278US8989888B2Automatic fault detection and classification in a plasma processing system and methods thereofYUN GUNSU·Filed 2010·Granted Mar 24, 2015·7 cites·25 claims
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