Assignee
YUN SEOKMIN
US·3 granted patents·2 pending applications·1 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0158US9236279B2Method of dielectric film treatmentYUN SEOKMIN·Filed 2008·Granted Jan 12, 2016·1 cites·17 claims
- 0243US2012115332A1Method of Post Etch Polymer Residue RemovalYUN SEOKMIN·Filed 2012·Application pending·0 cites
- 0339US8277675B2Method of damaged low-k dielectric film layer removalYUN SEOKMIN·Filed 2006·Granted Oct 2, 2012·0 cites·17 claims
- 0437US8277570B2Method of preventing premature dryingYUN SEOKMIN·Filed 2011·Granted Oct 2, 2012·0 cites·13 claims
- 0528US2012103371A1Method and apparatus for drying a semiconductor waferYUN SEOKMIN·Filed 2010·Application pending·0 cites
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