Assignee
ZABLE HAROLD ROBERT
US·5 granted patents·90 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0196US8221939B2Method and system for fracturing a pattern using charged particle beam lithography with multiple exposure passes having different dosagesZABLE HAROLD ROBERT·Filed 2009·Granted Jul 17, 2012·21 cites·25 claims
- 0295US8137871B2Method and system for fracturing a pattern using charged particle beam lithography with multiple exposure passes which expose different surface areaZABLE HAROLD ROBERT·Filed 2009·Granted Mar 20, 2012·36 cites·26 claims
- 0392US8062813B2Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithographyZABLE HAROLD ROBERT·Filed 2010·Granted Nov 22, 2011·27 cites·29 claims
- 0482US8492055B2Method and system for fracturing a pattern using lithography with multiple exposure passesZABLE HAROLD ROBERT·Filed 2012·Granted Jul 23, 2013·2 cites·25 claims
- 0574US8221940B2Method and system for fracturing a pattern using charged particle beam lithography with multiple exposure passesZABLE HAROLD ROBERT·Filed 2009·Granted Jul 17, 2012·4 cites·24 claims
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