Assignee
ZACZEK CHRISTOPH
DE·1 granted patent·1 pending application·0 citations·filing 2006–2011
Top patents by PatentIndex Score
2 records- 0145US9684252B2Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an elementZACZEK CHRISTOPH·Filed 2011·Granted Jun 20, 2017·0 cites·13 claims
- 0239US2006262389A1Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the sameZACZEK CHRISTOPH·Filed 2006·Application pending·0 cites
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