Assignee
ZAMA KAZUHIRO
JP·3 granted patents·7 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0177US8686383B2Object holding apparatus, and inspection apparatusZAMA KAZUHIRO·Filed 2012·Granted Apr 1, 2014·3 cites·16 claims
- 0274US8310667B2Wafer surface inspection apparatus and wafer surface inspection methodZAMA KAZUHIRO·Filed 2008·Granted Nov 13, 2012·4 cites·45 claims
- 0350US8183549B2Substrate holding apparatus, and inspection or processing apparatusZAMA KAZUHIRO·Filed 2011·Granted May 22, 2012·0 cites·31 claims
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