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ZEIDLER DIRK

DE3 patents

Top patents by PatentIndex Score

US8598525B2Dec 3, 2013

Particle beam system

ZEIDLER DIRK29 citations92

US9384938B2Jul 5, 2016

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

ZEIDLER DIRK9 citations82

US8759760B2Jun 24, 2014

Inspection system

ZEIDLER DIRK5 citations71