Assignee
ZEISS CARL LASER OPTICS GMBH
DE·17 granted patents·7 pending applications·141 citations·filing 2002–2014
Top patents by PatentIndex Score
24 records- 0193US7538948B2Optical illumination system for creating a line beamZEISS CARL LASER OPTICS GMBH·Filed 2005·Granted May 26, 2009·21 cites·48 claims
- 0289US7321468B2Method and optical arrangement for beam guiding of a light beam with beam delayZEISS CARL LASER OPTICS GMBH·Filed 2004·Granted Jan 22, 2008·35 cites·37 claims
- 0386US9933711B2Optical elementZEISS CARL LASER OPTICS GMBH·Filed 2014·Granted Apr 3, 2018·5 cites·24 claims
- 0486US8342701B2Reflective optical element for use in an EUV systemZEISS CARL LASER OPTICS GMBH·Filed 2010·Granted Jan 1, 2013·14 cites·25 claims
- 0585US9541685B2Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this typeZEISS CARL LASER OPTICS GMBH·Filed 2013·Granted Jan 10, 2017·10 cites·16 claims
- 0683US7629572B2Optical devices and related systems and methodsZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted Dec 8, 2009·7 cites·22 claims
- 0782US7864429B2Optical illumination system for creating a line beamZEISS CARL LASER OPTICS GMBH·Filed 2009·Granted Jan 4, 2011·10 cites·20 claims
- 0873US7175773B1Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed gratingZEISS CARL LASER OPTICS GMBH·Filed 2004·Granted Feb 13, 2007·12 cites·28 claims
- 0971US9297936B2Mirror with dielectric coatingZEISS CARL LASER OPTICS GMBH·Filed 2012·Granted Mar 29, 2016·3 cites·18 claims
- 1068US7944615B2Optical system and method for shaping a profile of a laser beamZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted May 17, 2011·6 cites·48 claims
- 1164US6762881B2Optical arrangement, Littrow grating for use in an optical arrangement and also use of a Littrow gratingZEISS CARL LASER OPTICS GMBH·Filed 2002·Granted Jul 13, 2004·9 cites·11 claims
- 1263US7486707B2Optical delay module for lenghtening the propagation path of a light beam and pulse multiplication or elongation moduleZEISS CARL LASER OPTICS GMBH·Filed 2004·Granted Feb 3, 2009·6 cites·26 claims
- 1358US7187499B2Optical grating and method for the manufacture of such an optical gratingZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted Mar 6, 2007·2 cites·19 claims
- 1453US9703209B2Reflective optical element for grazing incidence in the EUV wavelength rangeZEISS CARL LASER OPTICS GMBH·Filed 2014·Granted Jul 11, 2017·0 cites·30 claims
- 1553US2010024865A1Continuous coating installation, methods for producing crystalline solar cells, and solar cellZEISS CARL LASER OPTICS GMBH·Filed 2009·Application pending·0 cites
- 1645US9042032B2Optical arrangement for converting an incident light beam, method for converting a light beam to a line focus, and optical device thereforZEISS CARL LASER OPTICS GMBH·Filed 2013·Granted May 26, 2015·0 cites·20 claims
- 1745US7477438B2Optical imaging system for imaging at least two planes of a light beam spaced apart in the beam directionZEISS CARL LASER OPTICS GMBH·Filed 2003·Granted Jan 13, 2009·1 cites·22 claims
- 1843US2008316748A1Illumination systemZEISS CARL LASER OPTICS GMBH·Filed 2007·Application pending·0 cites
- 1943US2009027776A1Method for coating an optical component for a laser arrangement and related optical componentZEISS CARL LASER OPTICS GMBH·Filed 2008·Application pending·0 cites
- 2042US2013176614A1Euv collector mirror shell of an euv collector for euv lithographyZEISS CARL LASER OPTICS GMBH·Filed 2013·Application pending·0 cites
- 2141US7092161B2Optical arrangement, optical grating and method for the manufacture of such an optical gratingZEISS CARL LASER OPTICS GMBH·Filed 2004·Granted Aug 15, 2006·0 cites·19 claims
- 2239US2004091012A1Apparatus for compressing the bandwidth of a light beamZEISS CARL LASER OPTICS GMBH·Filed 2003·Application pending·0 cites
- 2338US2015092170A1Method for repairing optical elements, and optical elementZEISS CARL LASER OPTICS GMBH·Filed 2014·Application pending·0 cites
- 2434US2015083938A1Cooler for plasma generation chamber of euv radiation sourceZEISS CARL LASER OPTICS GMBH·Filed 2014·Application pending·0 cites
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