Assignee
ZEISS STIFTUNG
DE·785 granted patents·5 pending applications·30,566 citations·filing 1972–2006
Top patents by PatentIndex Score
790 records- 0198US6636350B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2001·Granted Oct 21, 2003·123 cites·26 claims
- 0298US6438199B1Illumination system particularly for microlithographyZEISS STIFTUNG·Filed 2000·Granted Aug 20, 2002·199 cites·65 claims
- 0398US6198793B1Illumination system particularly for EUV lithographyZEISS STIFTUNG·Filed 1999·Granted Mar 6, 2001·236 cites·54 claims
- 0498US6191880B1Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangementZEISS STIFTUNG·Filed 1999·Granted Feb 20, 2001·288 cites·5 claims
- 0598US5251156AMethod and apparatus for non-contact measurement of object surfacesZEISS STIFTUNG·Filed 1991·Granted Oct 5, 1993·296 cites·14 claims
- 0698US4825091AOptoelectronic distance sensor with visible pilot beamZEISS STIFTUNG·Filed 1988·Granted Apr 25, 1989·313 cites·8 claims
- 0797US6873476B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2001·Granted Mar 29, 2005·87 cites·38 claims
- 0897US6535273B1Microlithographic illumination system with depolarizerZEISS STIFTUNG·Filed 2001·Granted Mar 18, 2003·99 cites·9 claims
- 0997US6392800B2Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangementZEISS STIFTUNG·Filed 2000·Granted May 21, 2002·123 cites·2 claims
- 1097US6252712B1Optical system with polarization compensatorZEISS STIFTUNG·Filed 1999·Granted Jun 26, 2001·213 cites·14 claims
- 1197US5675401AIlluminating arrangement including a zoom objective incorporating two axiconsZEISS STIFTUNG·Filed 1995·Granted Oct 7, 1997·197 cites·19 claims
- 1297US5396712ACoordinate measuring deviceZEISS STIFTUNG·Filed 1993·Granted Mar 14, 1995·171 cites·13 claims
- 1397US5359417ASurgical microscope for conducting computer-supported stereotactic microsurgery and a method for operating the sameZEISS STIFTUNG·Filed 1992·Granted Oct 25, 1994·237 cites·14 claims
- 1497US4962591ACalibration-test member for a coordinate-measuring instrumentZEISS STIFTUNG·Filed 1989·Granted Oct 16, 1990·131 cites·7 claims
- 1597US4961267AMethod and apparatus for making coordinate measurementsZEISS STIFTUNG·Filed 1988·Granted Oct 9, 1990·186 cites·28 claims
- 1697US4523450AMethod of calibrating probe pins on multicoordinate measurement machinesZEISS STIFTUNG·Filed 1982·Granted Jun 18, 1985·104 cites·11 claims
- 1797US4427889AMethod and apparatus for molecular spectroscopy, particularly for the determination of products of metabolismZEISS STIFTUNG·Filed 1980·Granted Jan 24, 1984·251 cites·13 claims
- 1897US4407008AMethod and apparatus for light-induced scanning-microscope display of specimen parameters and of their distributionZEISS STIFTUNG·Filed 1981·Granted Sep 27, 1983·212 cites·27 claims
- 1997US4397556AMaterial-testing method and apparatusZEISS STIFTUNG·Filed 1980·Granted Aug 9, 1983·148 cites·15 claims
- 2096US7109678B2Holding arrangement having an apparatus for balancing a load torqueZEISS STIFTUNG·Filed 2004·Granted Sep 19, 2006·110 cites·29 claims
- 2196US6483573B1Projection exposure system and an exposure method in microlithographyZEISS STIFTUNG·Filed 2000·Granted Nov 19, 2002·84 cites·12 claims
- 2296US4962313AWien-type imaging corrector for an electron microscopeZEISS STIFTUNG·Filed 1989·Granted Oct 9, 1990·87 cites·11 claims
- 2396US4596030AApparatus for generating a source of plasma with high radiation intensity in the X-ray regionZEISS STIFTUNG·Filed 1984·Granted Jun 17, 1986·130 cites·18 claims
- 2496US4177568AMeasurement headZEISS STIFTUNG·Filed 1978·Granted Dec 11, 1979·86 cites·24 claims
- 2595US7218445B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2003·Granted May 15, 2007·53 cites·9 claims
- 2695US6665126B2Projection exposure lens with aspheric elementsZEISS STIFTUNG·Filed 2000·Granted Dec 16, 2003·66 cites·78 claims
- 2795US6583937B1Illuminating system of a microlithographic projection exposure arrangementZEISS STIFTUNG·Filed 2001·Granted Jun 24, 2003·104 cites·35 claims
- 2895US6546643B2Articulated device for the probe head of a coordinate measuring apparatusZEISS STIFTUNG·Filed 2001·Granted Apr 15, 2003·103 cites·29 claims
- 2995US6400794B1Illumination system, particularly for EUV lithographyZEISS STIFTUNG·Filed 2000·Granted Jun 4, 2002·63 cites·31 claims
- 3095US6285443B1Illuminating arrangement for a projection microlithographic apparatusZEISS STIFTUNG·Filed 1999·Granted Sep 4, 2001·195 cites·29 claims
- 3195US6184490B1Material irradiation apparatus with a beam source that produces a processing beam for a workpiece, and a process for operation thereofZEISS STIFTUNG·Filed 1997·Granted Feb 6, 2001·130 cites·33 claims
- 3295US6089713ASpectacle lens with spherical front side and multifocal back side and process for its productionZEISS STIFTUNG·Filed 1998·Granted Jul 18, 2000·110 cites·8 claims
- 3395US5615489AMethod of making coordinate measurements on workpiecesZEISS STIFTUNG·Filed 1993·Granted Apr 1, 1997·215 cites·15 claims
- 3495US5285397ACoordinate-measuring machine for non-contact measurement of objectsZEISS STIFTUNG·Filed 1990·Granted Feb 8, 1994·145 cites·25 claims
- 3595US5038258AIlluminating arrangement for illuminating an object with incident lightZEISS STIFTUNG·Filed 1990·Granted Aug 6, 1991·211 cites·15 claims
- 3695US4888877AArticulating head for a coordinate-measuring instrumentZEISS STIFTUNG·Filed 1988·Granted Dec 26, 1989·318 cites·18 claims
- 3795US4872755AInterferometer for measuring optical phase differencesZEISS STIFTUNG·Filed 1988·Granted Oct 10, 1989·127 cites·16 claims
- 3895US4769763AControl for coordinate measuring instrumentsZEISS STIFTUNG·Filed 1986·Granted Sep 6, 1988·212 cites·9 claims
- 3995US4587622AMethod and apparatus for determining and correcting guidance errorsZEISS STIFTUNG·Filed 1982·Granted May 6, 1986·84 cites·15 claims
- 4095US4529873AOptical control circuit for electrochromic layersZEISS STIFTUNG·Filed 1982·Granted Jul 16, 1985·240 cites·16 claims
- 4195US4529275AContinuous charge control for electrochromic layersZEISS STIFTUNG·Filed 1982·Granted Jul 16, 1985·222 cites·20 claims
- 4295US4523732AAdjustable stand for optical observation instrumentsZEISS STIFTUNG·Filed 1981·Granted Jun 18, 1985·114 cites·10 claims
- 4395US4512637AMethod and means for stepwise charge control of electrochromic layersZEISS STIFTUNG·Filed 1982·Granted Apr 23, 1985·247 cites·17 claims
- 4494US6885502B2Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangementZEISS STIFTUNG·Filed 2002·Granted Apr 26, 2005·47 cites·2 claims
- 4594US6629778B1Fluid pressure bearingZEISS STIFTUNG·Filed 2000·Granted Oct 7, 2003·42 cites·60 claims
- 4694US6631036B2Catadioptric objectiveZEISS STIFTUNG·Filed 2000·Granted Oct 7, 2003·67 cites·51 claims
- 4794US6600608B1Catadioptric objective comprising two intermediate imagesZEISS STIFTUNG·Filed 1999·Granted Jul 29, 2003·129 cites·64 claims
- 4894US6507440B1Components with an anamorphotic effect for reducing an aspect ratio of a raster element in an illumination systemZEISS STIFTUNG·Filed 2000·Granted Jan 14, 2003·68 cites·47 claims
- 4994US6396587B1Method for recording depth profiles in a specimen and apparatus thereforZEISS STIFTUNG·Filed 2000·Granted May 28, 2002·87 cites·12 claims
- 5094US5360426AForce-controlled contact applicator for laser radiationZEISS STIFTUNG·Filed 1991·Granted Nov 1, 1994·120 cites·16 claims
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