Assignee
ZETA INSTR INC
US·14 granted patents·1 pending application·73 citations·filing 2007–2017
Top patents by PatentIndex Score
15 records- 0196US7729049B23-d optical microscopeZETA INSTR INC·Filed 2007·Granted Jun 1, 2010·37 cites·8 claims
- 0293US7944609B23-D optical microscopeZETA INSTR INC·Filed 2010·Granted May 17, 2011·14 cites·34 claims
- 0390US10094787B2Multi-surface specular reflection inspectorZETA INSTR INC·Filed 2016·Granted Oct 9, 2018·4 cites·20 claims
- 0490US9921169B2Method of detecting defect location using multi-surface specular reflectionZETA INSTR INC·Filed 2016·Granted Mar 20, 2018·4 cites·16 claims
- 0590US8830457B1Multi-surface optical inspectorZETA INSTR INC·Filed 2013·Granted Sep 9, 2014·9 cites·13 claims
- 0681US10157457B2Optical measurement of opening dimensions in a waferZETA INSTR INC·Filed 2016·Granted Dec 18, 2018·4 cites·19 claims
- 0766US10168524B2Optical measurement of bump hieghtZETA INSTR INC·Filed 2016·Granted Jan 1, 2019·1 cites·22 claims
- 0863US10338009B2Method and apparatus to detect defects in transparent solidsZETA INSTR INC·Filed 2017·Granted Jul 2, 2019·0 cites·20 claims
- 0961US9784691B2Method and apparatus to optically detect defects in transparent solidsZETA INSTR INC·Filed 2014·Granted Oct 10, 2017·0 cites·13 claims
- 1051US9664888B2Multi-surface optical 3D microscopeZETA INSTR INC·Filed 2015·Granted May 30, 2017·0 cites·20 claims
- 1150US9645381B2Multi-surface optical 3D microscopeZETA INSTR INC·Filed 2015·Granted May 9, 2017·0 cites·11 claims
- 1249US10209501B23D microscope and methods of measuring patterned substratesZETA INSTR INC·Filed 2016·Granted Feb 19, 2019·0 cites·15 claims
- 1342US10769769B2Dual mode inspectorZETA INSTR INC·Filed 2016·Granted Sep 8, 2020·0 cites·22 claims
- 1438US2018045937A1Automated 3-d measurementZETA INSTR INC·Filed 2016·Application pending·0 cites
- 1532US10359613B2Optical measurement of step size and plated metal thicknessZETA INSTR INC·Filed 2016·Granted Jul 23, 2019·0 cites·18 claims
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