Assignee
ZETETIC INST
US·40 granted patents·4 pending applications·1,670 citations·filing 1995–2008
Top patents by PatentIndex Score
44 records- 0199US6445453B1Scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2000·Granted Sep 3, 2002·139 cites·53 claims
- 0298US6480285B1Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensationZETETIC INST·Filed 2000·Granted Nov 12, 2002·227 cites·92 claims
- 0398US6091496AMultiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensationZETETIC INST·Filed 1998·Granted Jul 18, 2000·305 cites·9 claims
- 0497US6775009B2Differential interferometric scanning near-field confocal microscopyZETETIC INST·Filed 2001·Granted Aug 10, 2004·94 cites·36 claims
- 0597US6753968B2Optical storage system based on scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2003·Granted Jun 22, 2004·62 cites·46 claims
- 0697US6606159B1Optical storage system based on scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2000·Granted Aug 12, 2003·56 cites·49 claims
- 0796US5760901AMethod and apparatus for confocal interference microscopy with background amplitude reduction and compensationZETETIC INST·Filed 1997·Granted Jun 2, 1998·165 cites·39 claims
- 0894US7298496B2Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometryZETETIC INST·Filed 2005·Granted Nov 20, 2007·34 cites·25 claims
- 0993US6717736B1Catoptric and catadioptric imaging systemsZETETIC INST·Filed 2003·Granted Apr 6, 2004·61 cites·54 claims
- 1092US6847029B2Multiple-source arrays with optical transmission enhanced by resonant cavitiesZETETIC INST·Filed 2001·Granted Jan 25, 2005·51 cites·46 claims
- 1192US6552852B2Catoptric and catadioptric imaging systemsZETETIC INST·Filed 2001·Granted Apr 22, 2003·51 cites·22 claims
- 1291US6667809B2Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensationZETETIC INST·Filed 2001·Granted Dec 23, 2003·52 cites·28 claims
- 1391US6552805B2Control of position and orientation of sub-wavelength aperture array in near-field microscopyZETETIC INST·Filed 2001·Granted Apr 22, 2003·52 cites·32 claims
- 1484US7460245B2Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometryZETETIC INST·Filed 2006·Granted Dec 2, 2008·14 cites·28 claims
- 1584US5614763AMethods for improving performance and temperature robustness of optical coupling between solid state light sensors and optical systemsZETETIC INST·Filed 1995·Granted Mar 25, 1997·103 cites·14 claims
- 1681US7180604B2Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfacesZETETIC INST·Filed 2005·Granted Feb 20, 2007·4 cites·32 claims
- 1780US7324216B2Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafersZETETIC INST·Filed 2005·Granted Jan 29, 2008·5 cites·33 claims
- 1880US7145663B2Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfacesZETETIC INST·Filed 2005·Granted Dec 5, 2006·6 cites·31 claims
- 1976US7345771B2Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masksZETETIC INST·Filed 2005·Granted Mar 18, 2008·4 cites·39 claims
- 2074US7428058B2Apparatus and method for in situ and ex situ measurements of optical system flareZETETIC INST·Filed 2006·Granted Sep 23, 2008·3 cites·35 claims
- 2172US7161680B2Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometryZETETIC INST·Filed 2005·Granted Jan 9, 2007·7 cites·25 claims
- 2270US7084983B2Interferometric confocal microscopy incorporating a pinhole array beam-splitterZETETIC INST·Filed 2004·Granted Aug 1, 2006·12 cites·30 claims
- 2368US7508527B2Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometryZETETIC INST·Filed 2006·Granted Mar 24, 2009·5 cites·36 claims
- 2468US7355722B2Catoptric and catadioptric imaging systems with adaptive catoptric surfacesZETETIC INST·Filed 2004·Granted Apr 8, 2008·10 cites·70 claims
- 2568US5915048AMethod and apparatus for discriminating in-focus images from out-of-focus light signals from background and foreground light sourcesZETETIC INST·Filed 1996·Granted Jun 22, 1999·97 cites·37 claims
- 2667US7084984B2Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrologyZETETIC INST·Filed 2004·Granted Aug 1, 2006·6 cites·21 claims
- 2763US7324209B2Apparatus and method for ellipsometric measurements with high spatial resolutionZETETIC INST·Filed 2004·Granted Jan 29, 2008·4 cites·20 claims
- 2862US7023560B2Method and apparatus for dark field interferometric confocal microscopyZETETIC INST·Filed 2004·Granted Apr 4, 2006·7 cites·20 claims
- 2961US7099014B2Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometryZETETIC INST·Filed 2004·Granted Aug 29, 2006·9 cites·20 claims
- 3060US7046372B2Transverse differential interferometric confocal microscopyZETETIC INST·Filed 2004·Granted May 16, 2006·6 cites·39 claims
- 3155US7312877B2Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopyZETETIC INST·Filed 2004·Granted Dec 25, 2007·6 cites·42 claims
- 3255US7133139B2Longitudinal differential interferometric confocal microscopyZETETIC INST·Filed 2004·Granted Nov 7, 2006·4 cites·21 claims
- 3354US7054077B2Method for constructing a catadioptric lens systemZETETIC INST·Filed 2004·Granted May 30, 2006·3 cites·21 claims
- 3453US7646490B2Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase shifting point-diffraction interferometryZETETIC INST·Filed 2007·Granted Jan 12, 2010·1 cites·27 claims
- 3550US7009712B2Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenchesZETETIC INST·Filed 2004·Granted Mar 7, 2006·4 cites·16 claims
- 3647US7495769B2Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometryZETETIC INST·Filed 2008·Granted Feb 24, 2009·0 cites·43 claims
- 3744US2005111007A1Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfacesZETETIC INST·Filed 2004·Application pending·0 cites
- 3842US7263259B2Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavitiesZETETIC INST·Filed 2004·Granted Aug 28, 2007·0 cites·36 claims
- 3942US7164480B2Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopyZETETIC INST·Filed 2004·Granted Jan 16, 2007·0 cites·39 claims
- 4042US7064838B2Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometryZETETIC INST·Filed 2004·Granted Jun 20, 2006·1 cites·47 claims
- 4141US7405832B2Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometryZETETIC INST·Filed 2006·Granted Jul 29, 2008·0 cites·22 claims
- 4240US2004257577A1Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometryZETETIC INST·Filed 2004·Application pending·0 cites
- 4340US2007121115A1Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometryZETETIC INST·Filed 2006·Application pending·0 cites
- 4440US2007014319A1Continuously Tunable External Cavity Diode Laser Sources With High Tuning And Switching Rates And Extended Tuning RangesZETETIC INST·Filed 2006·Application pending·0 cites
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