Assignee
ZETTLER JOERG-THOMAS
DE·4 granted patents·13 citations·filing 2010–2010
Top patents by PatentIndex Score
4 records- 0174US8514408B2Method and apparatus for real-time determination of curvature and azimuthal asymmetry of a surfaceZETTLER JOERG-THOMAS·Filed 2010·Granted Aug 20, 2013·6 cites·13 claims
- 0265US8496375B2Pyrometer adapted for detecting UV-radiation and use thereofZETTLER JOERG-THOMAS·Filed 2010·Granted Jul 30, 2013·3 cites·18 claims
- 0358US8388219B2Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting waferZETTLER JOERG-THOMAS·Filed 2010·Granted Mar 5, 2013·3 cites·15 claims
- 0455US8233158B2Method and apparatus for determining the layer thickness and the refractive index of a sampleZETTLER JOERG-THOMAS·Filed 2010·Granted Jul 31, 2012·1 cites·15 claims
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