Assignee
ZHANG JINGCHUN
US·5 granted patents·1,273 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0198US9324576B2Selective etch for silicon filmsZHANG JINGCHUN·Filed 2011·Granted Apr 26, 2016·152 cites·16 claims
- 0298US9064815B2Methods for etch of metal and metal-oxide filmsZHANG JINGCHUN·Filed 2012·Granted Jun 23, 2015·564 cites·10 claims
- 0398US8999856B2Methods for etch of sin filmsZHANG JINGCHUN·Filed 2012·Granted Apr 7, 2015·187 cites·17 claims
- 0498US8771539B2Remotely-excited fluorine and water vapor etchZHANG JINGCHUN·Filed 2011·Granted Jul 8, 2014·185 cites·14 claims
- 0598US8771536B2Dry-etch for silicon-and-carbon-containing filmsZHANG JINGCHUN·Filed 2011·Granted Jul 8, 2014·185 cites·18 claims
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