Assignee
ZHANG SHOUYIN
US·4 granted patents·49 citations·filing 2009–2012
Technology mixH01J4
Top patents by PatentIndex Score
4 records- 0194US8253118B2Charged particle beam system having multiple user-selectable operating modesZHANG SHOUYIN·Filed 2009·Granted Aug 28, 2012·32 cites·22 claims
- 0288US8445870B2Charged particle beam system having multiple user-selectable operating modesZHANG SHOUYIN·Filed 2011·Granted May 21, 2013·14 cites·14 claims
- 0374US8736177B2Compact RF antenna for an inductively coupled plasma ion sourceZHANG SHOUYIN·Filed 2010·Granted May 27, 2014·3 cites·21 claims
- 0442US9196451B2Plasma source for charged particle beam systemZHANG SHOUYIN·Filed 2012·Granted Nov 24, 2015·0 cites·12 claims
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