Assignee
ZHENG BO
US4 patents
Top patents by PatentIndex Score
US8772162B2Jul 8, 2014
Method for removing native oxide and associated residue from a substrate
ZHENG BO5 citations83
US8455352B1Jun 4, 2013
Method for removing native oxide and associated residue from a substrate
ZHENG BO10 citations83
US8747686B2Jun 10, 2014
Methods of end point detection for substrate fabrication processes
ZHENG BO5 citations72
US8912096B2Dec 16, 2014
Methods for precleaning a substrate prior to metal silicide fabrication process
ZHENG BO1 citations45