Assignee
ZHOU TIANSHENG
CA10 patents
Top patents by PatentIndex Score
US8165323B2Apr 24, 2012
Monolithic capacitive transducer
ZHOU TIANSHENG49 citations96
US9036231B2May 19, 2015
Micro-electro-mechanical systems micromirrors and micromirror arrays
ZHOU TIANSHENG11 citations82
US8472105B2Jun 25, 2013
MEMS micromirror and micromirror array
ZHOU TIANSHENG5 citations82
US8238018B2Aug 7, 2012
MEMS micromirror and micromirror array
ZHOU TIANSHENG6 citations82
US7911672B2Mar 22, 2011
Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
ZHOU TIANSHENG12 citations82
US10551613B2Feb 4, 2020
Micro-electro-mechanical systems micromirrors and micromirror arrays
ZHOU TIANSHENG2 citations71
US11567312B2Jan 31, 2023
Micro-electro-mechanical systems micromirrors and micromirror arrays
ZHOU TIANSHENG0 citations61
US9086571B2Jul 21, 2015
MEMS optical device
ZHOU TIANSHENG1 citations61
US8389349B2Mar 5, 2013
Method of manufacturing a capacitive transducer
ZHOU TIANSHENG2 citations61
US9385634B2Jul 5, 2016
Rotational type of MEMS electrostatic actuator
ZHOU TIANSHENG0 citations40