Assignee
ZHOU WENZHAN
SG·2 granted patents·1 pending application·1 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0155US8572524B2Statistical optical proximity correctionZHOU WENZHAN·Filed 2007·Granted Oct 29, 2013·1 cites·19 claims
- 0249US8896810B2Liquid immersion scanning exposure system using an immersion liquid confined within a lens hoodZHOU WENZHAN·Filed 2009·Granted Nov 25, 2014·0 cites·20 claims
- 0333US2013325395A1Co-optimization of scatterometry mark design and process monitor mark designZHOU WENZHAN·Filed 2012·Application pending·0 cites
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