Assignee
ZIMMERMAN RICHARD CARL
US·3 granted patents·21 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0189US8629973B2Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensationZIMMERMAN RICHARD CARL·Filed 2010·Granted Jan 14, 2014·13 cites·20 claims
- 0281US9134620B2Double EUV illumination uniformity correction system and methodZIMMERMAN RICHARD CARL·Filed 2012·Granted Sep 15, 2015·4 cites·18 claims
- 0374US9075324B2Beam positioning and pointingZIMMERMAN RICHARD CARL·Filed 2007·Granted Jul 7, 2015·4 cites·37 claims
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