Assignee
ZINK PETER
DE·3 granted patents·7 citations·filing 2004–2008
Top patents by PatentIndex Score
3 records- 0162US8945310B2Method and device for cleaning at least one optical componentZINK PETER·Filed 2004·Granted Feb 3, 2015·7 cites·11 claims
- 0249US9110390B2Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivityZINK PETER·Filed 2007·Granted Aug 18, 2015·0 cites·9 claims
- 0345US8101930B2Method of increasing the operation lifetime of a collector optics arranged in an irradiation deviceZINK PETER·Filed 2008·Granted Jan 24, 2012·0 cites·5 claims
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