Assignee

ZOLLA HOWARD G

US·1 granted patent·2 citations·filing 2008–2008

Technology mixC23C1 H10F1 Y02E1 Y02P1

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0165US8323408B2Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formationZOLLA HOWARD G·Filed 2008·Granted Dec 4, 2012·2 cites·8 claims

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