Assignee
ZORDAN ENRICO
US·3 granted patents·4 citations·filing 2011–2011
Top patents by PatentIndex Score
3 records- 0170US8885148B2System and method for design of linear motor for vacuum environmentZORDAN ENRICO·Filed 2011·Granted Nov 11, 2014·3 cites·20 claims
- 0262US9274439B2Reticle clamping systemZORDAN ENRICO·Filed 2011·Granted Mar 1, 2016·1 cites·20 claims
- 0342US9335621B2Lithographic apparatus with an object support having actuating structures to apply a force and method for operating the sameZORDAN ENRICO·Filed 2011·Granted May 10, 2016·0 cites·20 claims
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