Assignee

ZYWNO MAREK

US·2 granted patents·10 citations·filing 2004–2008

Technology mixF16C2 B25B1 B82Y1 H01J1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0173US8058628B2Substrate processing apparatus and methodZYWNO MAREK·Filed 2008·Granted Nov 15, 2011·4 cites·69 claims
0250US6990737B2Fluid bearings and vacuum chucks and methods for producing sameZYWNO MAREK·Filed 2004·Granted Jan 31, 2006·6 cites·17 claims

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