Assignee
4WAVE INC
US·2 granted patents·1 pending application·47 citations·filing 2001–2002
Top patents by PatentIndex Score
3 records- 0187US6419803B1System and method for making thin-film structures using a stepped profile mask4WAVE INC·Filed 2001·Granted Jul 16, 2002·31 cites·8 claims
- 0279US6679976B2System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals4WAVE INC·Filed 2002·Granted Jan 20, 2004·16 cites·25 claims
- 0344US2002174832A1System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to an angular position of a rotating substrate4WAVE INC·Filed 2002·Application pending·0 cites
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