Assignee
ABATCHEV MIRZAFER
US·4 granted patents·1 pending application·22 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0188US8207614B2Methods for forming arrays of small, closely spaced featuresABATCHEV MIRZAFER·Filed 2008·Granted Jun 26, 2012·10 cites·15 claims
- 0287US8479384B2Methods for integrated circuit fabrication with protective coating for planarizationABATCHEV MIRZAFER·Filed 2011·Granted Jul 9, 2013·6 cites·20 claims
- 0382US9099402B2Integrated circuit structure having arrays of small, closely spaced featuresABATCHEV MIRZAFER·Filed 2012·Granted Aug 4, 2015·4 cites·19 claims
- 0468US9267605B2Pressure control valve assembly of plasma processing chamber and rapid alternating processABATCHEV MIRZAFER·Filed 2011·Granted Feb 23, 2016·2 cites·18 claims
- 0542US2013048082A1System, method and apparatus for real time control of rapid alternating processes (rap)ABATCHEV MIRZAFER·Filed 2011·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →