Assignee

ABE SHO

JP·1 granted patent·1 citations·filing 2009–2009

Technology mixC08F1 G03F1 Y10S1

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1 record

0162US8404426B2Negative resist composition, method of forming resist pattern and polymeric compoundABE SHO·Filed 2009·Granted Mar 26, 2013·1 cites·17 claims

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