Assignee
ACCENT OPTICAL TECH INC
US·8 granted patents·3 pending applications·571 citations·filing 2001–2006
Top patents by PatentIndex Score
11 records- 0196US6856408B2Line profile asymmetry measurement using scatterometryACCENT OPTICAL TECH INC·Filed 2002·Granted Feb 15, 2005·180 cites·56 claims
- 0295US7053991B2Differential numerical aperture methodsACCENT OPTICAL TECH INC·Filed 2004·Granted May 30, 2006·88 cites·19 claims
- 0394US6606152B2Determination of center of focus by diffraction signature analysisACCENT OPTICAL TECH INC·Filed 2002·Granted Aug 12, 2003·108 cites·50 claims
- 0494US6429930B1Determination of center of focus by diffraction signature analysisACCENT OPTICAL TECH INC·Filed 2001·Granted Aug 6, 2002·84 cites·47 claims
- 0590US6750968B2Differential numerical aperture methods and deviceACCENT OPTICAL TECH INC·Filed 2001·Granted Jun 15, 2004·46 cites·41 claims
- 0681US7110099B2Determination of center of focus by cross-section analysisACCENT OPTICAL TECH INC·Filed 2002·Granted Sep 19, 2006·23 cites·62 claims
- 0780US7119893B2Determination of center of focus by parameter variability analysisACCENT OPTICAL TECH INC·Filed 2004·Granted Oct 10, 2006·21 cites·34 claims
- 0878US6728663B2Structure identification using scattering signaturesACCENT OPTICAL TECH INC·Filed 2001·Granted Apr 27, 2004·21 cites·26 claims
- 0949US2006285111A1Apparatuses and methods for enhanced critical dimension scatterometryACCENT OPTICAL TECH INC·Filed 2006·Application pending·0 cites
- 1044US2007000434A1Apparatuses and methods for detecting defects in semiconductor workpiecesACCENT OPTICAL TECH INC·Filed 2006·Application pending·0 cites
- 1141US2007176119A1Apparatuses and methods for analyzing semiconductor workpiecesACCENT OPTICAL TECH INC·Filed 2006·Application pending·0 cites
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