Assignee
ACTIVE IMPULSE SYSTEMS INC
US·8 granted patents·496 citations·filing 1997–2000
Top patents by PatentIndex Score
8 records- 0194US6348967B1Method and device for measuring the thickness of opaque and transparent filmsACTIVE IMPULSE SYSTEMS INC·Filed 2000·Granted Feb 19, 2002·65 cites·31 claims
- 0292US6256100B1Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structureACTIVE IMPULSE SYSTEMS INC·Filed 1998·Granted Jul 3, 2001·78 cites·33 claims
- 0392US5812261AMethod and device for measuring the thickness of opaque and transparent filmsACTIVE IMPULSE SYSTEMS INC·Filed 1997·Granted Sep 22, 1998·102 cites·33 claims
- 0491US6081330AMethod and device for measuring the thickness of opaque and transparent filmsACTIVE IMPULSE SYSTEMS INC·Filed 1998·Granted Jun 27, 2000·88 cites·10 claims
- 0586US6052185AMethod and apparatus for measuring the concentration of ions implanted in semiconductor materialsACTIVE IMPULSE SYSTEMS INC·Filed 1997·Granted Apr 18, 2000·63 cites·26 claims
- 0683US6069703AMethod and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structureACTIVE IMPULSE SYSTEMS INC·Filed 1998·Granted May 30, 2000·69 cites·38 claims
- 0768US6118533AMethod and apparatus for measuring the concentration of ions implanted in semiconductor materialsACTIVE IMPULSE SYSTEMS INC·Filed 1997·Granted Sep 12, 2000·27 cites·30 claims
- 0836US6075602AMethod and apparatus for measuring material properties using transient-grating spectroscopyACTIVE IMPULSE SYSTEMS INC·Filed 1999·Granted Jun 13, 2000·4 cites·4 claims
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