Assignee
ACTIVE PREC INC
US·4 granted patents·85 citations·filing 2002–2010
Top patents by PatentIndex Score
4 records- 0193US6756751B2Multiple degree of freedom substrate manipulatorACTIVE PREC INC·Filed 2002·Granted Jun 29, 2004·52 cites·22 claims
- 0291US8384570B2Encoder interpolator with enhanced precisionACTIVE PREC INC·Filed 2010·Granted Feb 26, 2013·11 cites·20 claims
- 0387US7898204B2High-speed substrate manipulatorACTIVE PREC INC·Filed 2007·Granted Mar 1, 2011·12 cites·20 claims
- 0472US6822407B2Multiple degree of freedom substrate manipulatorACTIVE PREC INC·Filed 2004·Granted Nov 23, 2004·10 cites·2 claims
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