Assignee
ADAPTIVE PLASMA TECH CORP
KR·6 granted patents·6 pending applications·2 citations·filing 2003–2022
Top patents by PatentIndex Score
12 records- 0173US10825655B1Separate plasma source coil and method of controlling the sameADAPTIVE PLASMA TECH CORP·Filed 2019·Granted Nov 3, 2020·1 cites·5 claims
- 0259US7524395B2Plasma chamber having plasma source coil and method for etching the wafer using the sameADAPTIVE PLASMA TECH CORP·Filed 2005·Granted Apr 28, 2009·1 cites·4 claims
- 0352US11538702B2Apparatus for monitoring an exchanging process of a semiconductor part and a method for the sameADAPTIVE PLASMA TECH CORP·Filed 2021·Granted Dec 27, 2022·0 cites·5 claims
- 0452US11315764B2Structure variable type of a plasma source coil and a method for controlling the sameADAPTIVE PLASMA TECH CORP·Filed 2020·Granted Apr 26, 2022·0 cites·1 claims
- 0552US2024096594A1System for etching with a plasmaADAPTIVE PLASMA TECH CORP·Filed 2022·Application pending·0 cites
- 0649US11841284B2Particle trapping apparatus for preventing an error of a pressure measurementADAPTIVE PLASMA TECH CORP·Filed 2022·Granted Dec 12, 2023·0 cites·2 claims
- 0748US12293933B2Electrostatic chuck with multiple heater zonesADAPTIVE PLASMA TECH CORP·Filed 2021·Granted May 6, 2025·0 cites·3 claims
- 0842US2021335651A1Apparatus for exchanging an article of a semi-conductor process and a method for exchanging the article using the sameADAPTIVE PLASMA TECH CORP·Filed 2020·Application pending·0 cites
- 0939US2008178806A1Plasma Source For Uniform Plasma Distribution in Plasma ChamberADAPTIVE PLASMA TECH CORP·Filed 2005·Application pending·0 cites
- 1033US2007274020A1Electrostatic Chuck And Chuck Base Having Cooling Path For Cooling WaferADAPTIVE PLASMA TECH CORP·Filed 2004·Application pending·0 cites
- 1131US2007201016A1Method And Apparatus For Seasoning Semiconductor Apparatus Of Sensing Plasma EquipmentADAPTIVE PLASMA TECH CORP·Filed 2004·Application pending·0 cites
- 1231US2003180971A1Plasma etching method and apparatus for manufacturing a semiconductor deviceADAPTIVE PLASMA TECH CORP·Filed 2003·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →