Assignee

ADAVANCED MICRO DEVICES INC

US·1 granted patent·31 citations·filing 2000–2000

Technology mixB24B1 G05B1 Y02P1

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0186US6741903B1Method for relating photolithography overlay target damage and chemical mechanical planarization (CMP) fault detection to CMP tool indentificationADAVANCED MICRO DEVICES INC·Filed 2000·Granted May 25, 2004·31 cites·36 claims

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