Assignee
ADE CORP
46 granted patents·3 pending applications·1,707 citations·filing 1974–2005
Top patents by PatentIndex Score
49 records- 0195US4750141AMethod and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing sameADE CORP·Filed 1985·Granted Jun 7, 1988·105 cites·27 claims
- 0295US4457664AWafer alignment stationADE CORP·Filed 1982·Granted Jul 3, 1984·133 cites·23 claims
- 0393US5511005AWafer handling and processing systemADE CORP·Filed 1994·Granted Apr 23, 1996·249 cites·31 claims
- 0493US5102280ARobot prealignerADE CORP·Filed 1989·Granted Apr 7, 1992·109 cites·28 claims
- 0592US5642298AWafer testing and self-calibration systemADE CORP·Filed 1996·Granted Jun 24, 1997·155 cites·11 claims
- 0691US4897015ARotary to linear motion robot armADE CORP·Filed 1987·Granted Jan 30, 1990·136 cites·11 claims
- 0791US3990005ACapacitive thickness gauging for ungrounded elementsADE CORP·Filed 1974·Granted Nov 2, 1976·46 cites·25 claims
- 0890US3986109ASelf-calibrating dimension gaugeADE CORP·Filed 1975·Granted Oct 12, 1976·45 cites·12 claims
- 0987US6400162B1Capacitive displacement sensor for measuring thin targetsADE CORP·Filed 2000·Granted Jun 4, 2002·41 cites·11 claims
- 1086US4958129APrealigner probeADE CORP·Filed 1989·Granted Sep 18, 1990·46 cites·19 claims
- 1184US4158171AWafer edge detection systemADE CORP·Filed 1977·Granted Jun 12, 1979·33 cites·16 claims
- 1282US6486946B1Method for discriminating between holes in and particles on a film covering a substrateADE CORP·Filed 2000·Granted Nov 26, 2002·26 cites·7 claims
- 1382US4918376AA.C. capacitive gauging systemADE CORP·Filed 1989·Granted Apr 17, 1990·41 cites·14 claims
- 1481US5456561ARobot prealignerADE CORP·Filed 1994·Granted Oct 10, 1995·62 cites·21 claims
- 1579US7280200B2Detection of a wafer edge using collimated lightADE CORP·Filed 2004·Granted Oct 9, 2007·25 cites·37 claims
- 1679US6491330B1Edge gripping end effector wafer handling apparatusADE CORP·Filed 2000·Granted Dec 10, 2002·34 cites·38 claims
- 1779US4217542ASelf inverting gauging systemADE CORP·Filed 1978·Granted Aug 12, 1980·26 cites·17 claims
- 1878US6560555B1Method for facilitating the field replacement of sensorsADE CORP·Filed 2000·Granted May 6, 2003·20 cites·12 claims
- 1977US6538733B2Ring chuck to hold 200 and 300 mm waferADE CORP·Filed 2001·Granted Mar 25, 2003·18 cites·10 claims
- 2075US4860229AWafer flatness stationADE CORP·Filed 1988·Granted Aug 22, 1989·42 cites·21 claims
- 2173US5708368AMethod and apparatus for emulation of a linear variable differential transducer by a capacitive gaging systemADE CORP·Filed 1996·Granted Jan 13, 1998·30 cites·23 claims
- 2272US6760100B2Method and apparatus for classifying defects occurring at or near a surface of a smooth substrateADE CORP·Filed 2001·Granted Jul 6, 2004·14 cites·41 claims
- 2371US5557267AApparatus and methods for measurement system calibrationADE CORP·Filed 1993·Granted Sep 17, 1996·23 cites·13 claims
- 2471US5332352ARobot prealignerADE CORP·Filed 1992·Granted Jul 26, 1994·40 cites·22 claims
- 2569US7302360B2Defect size projectionADE CORP·Filed 2005·Granted Nov 27, 2007·2 cites·18 claims
- 2669US4849916AImproved spatial resolution measurement system and methodADE CORP·Filed 1985·Granted Jul 18, 1989·24 cites·27 claims
- 2762US4931962AFixture and nonrepeatable error compensation systemADE CORP·Filed 1988·Granted Jun 5, 1990·29 cites·20 claims
- 2861US6594002B2Wafer shape accuracy using symmetric and asymmetric instrument error signaturesADE CORP·Filed 2001·Granted Jul 15, 2003·8 cites·14 claims
- 2961US6501269B1Vector kerr magnetometryADE CORP·Filed 2001·Granted Dec 31, 2002·12 cites·19 claims
- 3058US7114399B2Shaped non-contact capacitive displacement sensors for measuring shaped targetsADE CORP·Filed 2004·Granted Oct 3, 2006·8 cites·18 claims
- 3157US4692695AConductivity-type sensorADE CORP·Filed 1986·Granted Sep 8, 1987·15 cites·6 claims
- 3256US4646009AContacts for conductivity-type sensorsADE CORP·Filed 1985·Granted Feb 24, 1987·15 cites·3 claims
- 3355US6954269B2Ring chuck to hold 200 and 300 mm waferADE CORP·Filed 2003·Granted Oct 11, 2005·4 cites·27 claims
- 3455US6556941B2Separation of periodic and non-periodic signal componentsADE CORP·Filed 2001·Granted Apr 29, 2003·3 cites·4 claims
- 3554US7136519B2Specimen topography reconstructionADE CORP·Filed 2000·Granted Nov 14, 2006·4 cites·35 claims
- 3654US6025787AApparatus and methods for measurement system calibrationADE CORP·Filed 1996·Granted Feb 15, 2000·14 cites·10 claims
- 3754US4910453AMulti-probe grouping system with nonlinear error correctionADE CORP·Filed 1987·Granted Mar 20, 1990·14 cites·11 claims
- 3848US7184928B2Extended defect sizingADE CORP·Filed 2004·Granted Feb 27, 2007·0 cites·4 claims
- 3948US6621581B1Method and apparatus for mapping surface topography of a substrateADE CORP·Filed 1999·Granted Sep 16, 2003·21 cites·18 claims
- 4047US4353029ASelf inverting gauging systemADE CORP·Filed 1980·Granted Oct 5, 1982·9 cites·6 claims
- 4145US6260899B1Centrifugal gripper mechanism for dynamic force compensationADE CORP·Filed 2000·Granted Jul 17, 2001·4 cites·16 claims
- 4245US4228392ASecond order correction in linearized proximity probeADE CORP·Filed 1977·Granted Oct 14, 1980·6 cites·18 claims
- 4344US6476621B1Self-bootstrapping transducer interfaceADE CORP·Filed 2001·Granted Nov 5, 2002·4 cites·7 claims
- 4441US5786698ATransducer Bootstrapping apparatusADE CORP·Filed 1996·Granted Jul 28, 1998·8 cites·6 claims
- 4538US2004258295A1Method and system for classifying defects occurring at a surface of a substrate using graphical representation of multi-channel dataADE CORP·Filed 2004·Application pending·0 cites
- 4636US2004252879A1Method and system for analyzing and tracking defects among a plurality of substrates such as silicon wafersADE CORP·Filed 2004·Application pending·0 cites
- 4736US2005110287A1200 MM notched/flatted wafer edge gripping end effectorADE CORP·Filed 2004·Application pending·0 cites
- 4834US7175214B2Wafer gripping fingers to minimize distortionADE CORP·Filed 2004·Granted Feb 13, 2007·0 cites·10 claims
- 4933US6181142B1Nonlinear current mirror for loop-gain controlADE CORP·Filed 1998·Granted Jan 30, 2001·4 cites·9 claims
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