Assignee
ADE OPTICAL SYST CORP
US·8 granted patents·2 pending applications·614 citations·filing 1995–2003
Top patents by PatentIndex Score
10 records- 0194US6292259B1Wafer inspection system for distinguishing pits and particlesADE OPTICAL SYST CORP·Filed 2000·Granted Sep 18, 2001·78 cites·42 claims
- 0293US6118525AWafer inspection system for distinguishing pits and particlesADE OPTICAL SYST CORP·Filed 1997·Granted Sep 12, 2000·122 cites·21 claims
- 0392US6529270B1Apparatus and method for detecting defects in the surface of a workpieceADE OPTICAL SYST CORP·Filed 2000·Granted Mar 4, 2003·58 cites·48 claims
- 0492US5712701ASurface inspection system and method of inspecting surface of workpieceADE OPTICAL SYST CORP·Filed 1995·Granted Jan 27, 1998·164 cites·42 claims
- 0589US6509965B2Wafer inspection system for distinguishing pits and particlesADE OPTICAL SYST CORP·Filed 2001·Granted Jan 21, 2003·38 cites·16 claims
- 0686US5988971AWafer transfer robotADE OPTICAL SYST CORP·Filed 1997·Granted Nov 23, 1999·87 cites·23 claims
- 0771US6122047AMethods and apparatus for identifying the material of a particle occurring on the surface of a substrateADE OPTICAL SYST CORP·Filed 1999·Granted Sep 19, 2000·37 cites·32 claims
- 0855US5691812ACalibration standard for calibrating a defect inspection system and a method of forming sameADE OPTICAL SYST CORP·Filed 1996·Granted Nov 25, 1997·30 cites·20 claims
- 0942US2004085533A1Wafer inspection system for distinguishing pits and particlesADE OPTICAL SYST CORP·Filed 2003·Application pending·0 cites
- 1041US2003071992A1Wafer inspection system for distinguishing pits and particlesADE OPTICAL SYST CORP·Filed 2002·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →