Assignee
ADEL MICHAEL
IL·5 granted patents·91 citations·filing 2008–2011
Top patents by PatentIndex Score
5 records- 0196US9116442B2Feedforward/feedback litho process control of stress and overlayADEL MICHAEL·Filed 2011·Granted Aug 25, 2015·18 cites·38 claims
- 0294US8214771B2Scatterometry metrology target design optimizationADEL MICHAEL·Filed 2009·Granted Jul 3, 2012·32 cites·25 claims
- 0394US8111376B2Feedforward/feedback litho process control of stress and overlayADEL MICHAEL·Filed 2008·Granted Feb 7, 2012·20 cites·33 claims
- 0490US9151712B1Rule checking for metrology and inspectionADEL MICHAEL·Filed 2008·Granted Oct 6, 2015·16 cites·38 claims
- 0578US8930156B2Metrology through use of feed forward feed sideways and measurement cell re-useADEL MICHAEL·Filed 2009·Granted Jan 6, 2015·5 cites·37 claims
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