Assignee
ADERHOLD WOLFGANG
US·5 granted patents·1 pending application·35 citations·filing 2004–2009
Top patents by PatentIndex Score
6 records- 0189US8104951B2Temperature uniformity measurements during rapid thermal processingADERHOLD WOLFGANG·Filed 2007·Granted Jan 31, 2012·18 cites·19 claims
- 0277US8109669B2Temperature uniformity measurement during thermal processingADERHOLD WOLFGANG·Filed 2008·Granted Feb 7, 2012·8 cites·20 claims
- 0373US9431278B2Backside rapid thermal processing of patterned wafersADERHOLD WOLFGANG·Filed 2008·Granted Aug 30, 2016·3 cites·15 claims
- 0463US9640412B2Apparatus and method for enhancing the cool down of radiatively heated substratesADERHOLD WOLFGANG·Filed 2009·Granted May 2, 2017·1 cites·12 claims
- 0560US8658945B2Backside rapid thermal processing of patterned wafersADERHOLD WOLFGANG·Filed 2004·Granted Feb 25, 2014·5 cites·3 claims
- 0644US2008090393A1Ultra shallow junction with rapid thermal annealADERHOLD WOLFGANG·Filed 2007·Application pending·0 cites
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