Assignee
ADTEC CORP LIMITED
JP·2 granted patents·207 citations·filing 1997–1998
Top patents by PatentIndex Score
2 records- 0193US5936481ASystem for impedance matching and power control for apparatus for high frequency plasma treatmentADTEC CORP LIMITED·Filed 1998·Granted Aug 10, 1999·126 cites·4 claims
- 0289US6080271APlasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable coreADTEC CORP LIMITED·Filed 1997·Granted Jun 27, 2000·81 cites·2 claims
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